Precision Module - Servo Motor-Hefei Billian Precision Technology Co., Ltd.

Precision Module - Servo Motor

Achieving a repeated positioning accuracy of ±0.1μm, optimized specifically for wafer inspection equipment.

Mechanical Parameter	Leadscrew Pitch[mm]
Mechanical Parameter	0.25	0.4	0.5	0.8	1.0
Repeatability [±um]	0.06	0.1	0.13	0.2	0.25
Travel Stroke [mm]	5.5	5.5	5.5	10	15
Max Speed without payload [mm/s]	0.8	1.2	1.5	2.4	3
Max Payload Fx [N]	35	35	35	35	35
Max Payload Fy [N]	50	50	50	50	50
Max Payload Fz [N]	80	80	80	80	80
Electrical Parameter	Servo Motor
Motor Rated Power [W]	5
Motor Rated Current [A]	0.35
Motor Reted Voltage [V DC]	5-28
Motor Gear Ratio	30:1
Limit Switches	Hall Sensor